Hexachlorodisilane (HCDS)
Typical Applications
High purity hexachlorodisilane is used as precursor for low temperature chemical vapour deposition of thin film layers of SiN, SiON or epitaxial Si in semiconductor manufacturing processes. In addition, hexachlorodisilane can be utilized for the selective reduction of phosphine oxides in the pharmaceutical industry.
Product Details
Further Information
Storage:
Storage: P405: Store locked up.
Packaging:
Hexachlorodisilane is filled in stainless steel containers of various sizes. Please contact your local sales representative for more information about available container sizes.
Shelf life:
Siridion® HCDS 500E has a shelf life of min. 12 months from delivery.