Semiconductor Manufacturing

From etching and cleaning to thermal management and packaging, Evonik’s high-purity, high-performance solutions power semiconductor manufacturing

Precision starts at the molecular level. In the fast-evolving world of semiconductors, where every nanometer matters, Evonik delivers ultra-pure, high-performance materials that power the next generation of chips, sensors, and electronic devices. From enhancing mechanical and thermal properties to chemical vapor deposition and wafer cleaning and conditioning, our advanced chemistries help you push the boundaries of performance, purity, and process control.

Why Choose Evonik for Your Semiconductor Manufacturing?

  • Proven Performance:  Trusted products like Dynasylan®, Siridion®, PERTRONIC®, NANOPOX® , IDISIL® and 

  • are engineered for the most demanding semiconductor processes.

  • Ultra-High Purity: Our materials meet the strictest purity standards required for advanced microchip manufacturing.

  • Tailored Solutions: Whether you're scaling CVD processes or cleaning wafers with parts-per-trillion purity levels, our portfolio is specialized to your needs.

Key Solutions by Application

CVD & Thin Film Deposition

  • Siridion® – Ultra-pure silanes and chlorosilanes for precise deposition and etching in semiconductor fabrication. Ideal for advanced logic and memory applications.

  • Dynasylan® – Functional silanes for adhesion promotion, surface modification, and dielectric layer formation in CVD processes.

  • Silicon Tetrachloride – High-purity precursor for silicon-based thin films and etching applications.

Chips & Sensors

  • VPS®, ALBIDUR®, ALBIFLEX® – Specialty polymers and resins for encapsulation, protection, fatigue performance and mechanical stability in microelectronic components.

  • NANOPOX® RP-RGS®, RGS®, SL®, SEMI® – Advanced materials for sensor packaging, thermal management, and structural integrity in high-performance electronics.

Wafer Cleaning & Surface Preparation

  • SEMI Grade hydrogen peroxide – High-purity hydrogen peroxide ensures immaculate surfaces across all wafer layers. It also acts as an oxidizer to remove metal layers on the wafer.

  • IDISIL® – Colloidal silica for chemical mechanical planarization (CMP), enabling ultra-flat wafer surfaces for next-gen chip architectures.

  • TEGOMER®, VQM® – Surface-active agents and modifiers for cleaning, dispersion, and process optimization in wet-chemical steps.

Nanotechnology & Advanced Materials

  • NANOPOL®, NANOPOX® – Nano additives for enhanced flow characteristics, dimensional stability, mechanical, thermal, and dielectric properties in advanced semiconductor packaging and interconnects.

  • VISIOMER® – Specialty methacrylate monomers for high-performance resins and coatings used in semiconductor tooling and processing.

Your Evonik Advantage

  • A Trusted Supplier: Evonik regularly receives high supplier marks from its long-standing partners along the semiconductor value chain.

  • Global Support: Our semiconductor experts work closely with you to optimize formulations and processes.

  • Innovation-Driven: Backed by decades of R&D and a commitment to enabling the future of electronics.

Ready to Power the Next Generation of Semiconductors?

Discover how Evonik’s high-purity materials and specialty chemistries can help you improve yield, enhance reliability, and accelerate innovation in your semiconductor manufacturing.

Contact us today or explore our solutions to start your journey toward smarter, cleaner, and more efficient chip production.

PERTRONIC®

Suitable Products